In fields such as semiconductor manufacturing, aerospace test equipment, vacuum metallurgy, and high-energy physics, the establishment of a stable and clean ultra-high vacuum (UHV) environment is essential. Vacuum diffusion pump oil, as the working fluid in diffusion pumps, plays a pivotal role in achieving and maintaining the required vacuum performance.

Silicone-based diffusion pump oils offer excellent thermal stability, extremely low vapor pressure, and high resistance to oxidation. They can operate for extended periods at high temperatures without decomposition or coking, reducing the frequency of oil changes and maintenance. Their low volatility also minimizes backstreaming, keeping the vacuum chamber clean and protecting sensitive components such as electron beam sources, optics, and wafer holders.

These oils are suitable for achieving vacuums in the 10⁻⁶ to 10⁻⁸ Torr range and are compatible with most metallic pump structures and sealing materials. Applications include semiconductor process systems (PVD, CVD), solar panel manufacturing, vacuum coating units, research-grade particle accelerators, and high-voltage vacuum testing equipment.

To meet the increasing demands of extreme vacuum applications, premium grades of silicone diffusion pump oils have been developed with tailored molecular weights and optimized viscosity profiles. These formulations provide enhanced resistance to thermal degradation and oxidation. As industries push for lower base pressures, greater cleanliness, and improved system durability, silicone diffusion pump oils continue to evolve as an indispensable support material for high-end vacuum technologies.

Methyl Phenyl vinyl silicone Gum, plz check MY 3120